Illingworth's county team Yorkshire confirmed the news of his death via Twitter.
“We are deeply saddened to learn that Ray Illingworth has passed away. Our thoughts are with Ray’s family and the wider Yorkshire family who held Ray so dear to their hearts #OneRose,” Yorkshire tweeted.
Illingworth had been undergoing radiotherapy for oesophageal cancer. He represented England in 61 Tests between 1958 and 1973, and led the country 31 times, winning 12 matches and an Ashes series in Australia in 1970-71.
He was a multi-skilled cricketer, who scored 1,836 Test runs at an average of 23.24 and picked 122 wickets with his off-spin bowling at 31.20.
Ray Illingworth also served English cricket as a chief selector between 1993 and 1996, and coached the team in 1995-96.
Earlier this year, Illingworth's wife also died earlier after battling cancer and the former cricketer had supported law changes on assisted dying.
"I don't want to have the last 12 months that my wife had," Illingworth said. "She had a terrible time going from hospital to hospital and in pain."
(With AFP inputs)